"Metallization of microvias by sputter-deposition."

Teija Uusluoto et al. (2004)

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DOI: 10.1016/J.MICROREL.2003.08.001

access: closed

type: Journal Article

metadata version: 2020-02-22

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Teija Uusluoto, Paavo Jalonen, Harri Laaksonen, Aulis Tuominen:
Metallization of microvias by sputter-deposition. Microelectron. Reliab. 44(4): 587-593 (2004)

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