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"Positive charge generation due to species of hydrogen during NBTI ..."

Shimpei Tsujikawa, Jiro Yugami (2005)

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DOI: 10.1016/J.MICROREL.2004.03.018

access: closed

type: Journal Article

metadata version: 2020-02-22

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Shimpei Tsujikawa, Jiro Yugami:
Positive charge generation due to species of hydrogen during NBTI phenomenon in pMOSFETs with ultra-thin SiON gate dielectrics. Microelectron. Reliab. 45(1): 65-69 (2005)

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