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"Improved bending fatigue life of single crystal silicon micro-beam by ..."

Jun-Yong Tao et al. (2013)

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DOI: 10.1016/J.MICROREL.2013.07.074

access: closed

type: Journal Article

metadata version: 2020-02-22

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Jun-Yong Tao, Xiao-Jing Wang, Bin Liu, Yan-Lei Wang, Zhi-Qian Ren, Xun Chen:
Improved bending fatigue life of single crystal silicon micro-beam by phosphorus doping. Microelectron. Reliab. 53(9-11): 1667-1671 (2013)

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