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"Science-based MEMS reliability methodology."
D. M. Tanner et al. (2007)
- D. M. Tanner, T. B. Parson, A. D. Corwin, Jeremy A. Walraven, J. W. Wittwer, B. L. Boyce, S. R. Winzer:
Science-based MEMS reliability methodology. Microelectron. Reliab. 47(9-11): 1806-1811 (2007)
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