"Simulation and Experimental Validation of Scanning Capacitance Microscopy ..."

Maria Stangoni et al. (2002)

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DOI: 10.1016/S0026-2714(02)00215-9

access: closed

type: Journal Article

metadata version: 2020-02-22

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Maria Stangoni, Mauro Ciappa, Marco Buzzo, Markus Leicht, Wolfgang Fichtner:
Simulation and Experimental Validation of Scanning Capacitance Microscopy Measurements across Low-doped Epitaxial PN-Junction. Microelectron. Reliab. 42(9-11): 1701-1706 (2002)

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