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"Design strategy of localized halo profile for achieving sub-50 nm bulk MOSFET."

Chun-Hsing Shih, Yi-Min Chen, Chen-Hsin Lien (2004)

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DOI: 10.1016/J.MICROREL.2004.04.002

access: closed

type: Journal Article

metadata version: 2020-10-29

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Chun-Hsing Shih, Yi-Min Chen, Chen-Hsin Lien:
Design strategy of localized halo profile for achieving sub-50 nm bulk MOSFET. Microelectron. Reliab. 44(7): 1069-1075 (2004)

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