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"Application of MEMS behavioral simulation to Physics of Failure (PoF) ..."

Petra Schmitt et al. (2003)

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DOI: 10.1016/S0026-2714(03)00332-9

access: closed

type: Journal Article

metadata version: 2020-10-26

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Petra Schmitt, Francis Pressecq, Xavier Lafontan, Q.-H. Duong, Patrick Pons, Jean Marc Nicot, Coumar Oudéa, Daniel Estève, Jean-Yves Fourniols, Henri Camon:
Application of MEMS behavioral simulation to Physics of Failure (PoF) modeling. Microelectron. Reliab. 43(9-11): 1957-1962 (2003)

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