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"Volatility and vapourisation characterisation of new precursors."

Simon A. Rushworth et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.070

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/RushworthDKLO07
Simon A. Rushworth, Hywel Davies, Andrew J. Kingsley, Thomas Leese, Rajesh Odedra:
Volatility and vapourisation characterisation of new precursors. Microelectron. Reliab. 47(4-5): 718-721 (2007)

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