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"Reliability of 100 nm silicon nitride capacitors in an InP HEMT MMIC process."
William J. Rowe et al. (2003)
- William J. Rowe, Bruce M. Paine
, Adele E. Schmitz, Robert H. Walden, Michael J. Delaney:
Reliability of 100 nm silicon nitride capacitors in an InP HEMT MMIC process. Microelectron. Reliab. 43(6): 845-851 (2003)
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