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"Polarity asymmetry of stress and charge trapping behavior of thin Hf- and ..."
Albena Paskaleva, Martin Lemberger, Anton J. Bauer (2007)
- Albena Paskaleva, Martin Lemberger, Anton J. Bauer:
Polarity asymmetry of stress and charge trapping behavior of thin Hf- and Zr-silicate layers. Microelectron. Reliab. 47(12): 2094-2099 (2007)
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