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"FEM-based method to determine mechanical stress evolution during process ..."
S. Orain et al. (2007)
- S. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen:
FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectron. Reliab. 47(2-3): 295-301 (2007)
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