"Progressive breakdown in ultrathin SiON dielectrics and its effect on ..."

Robert O'Connor et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.10.027

access: closed

type: Journal Article

metadata version: 2020-02-22

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Robert O'Connor, Greg Hughes, Robin Degraeve, Ben Kaczer:
Progressive breakdown in ultrathin SiON dielectrics and its effect on transistor performance. Microelectron. Reliab. 45(5-6): 869-874 (2005)

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