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"Hydrogen-related influence of the metallization stack on characteristics ..."

Michael Nelhiebel et al. (2005)

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DOI: 10.1016/J.MICROREL.2005.07.020

access: closed

type: Journal Article

metadata version: 2020-02-22

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Michael Nelhiebel, J. Wissenwasser, Thomas Detzel, A. Timmerer, E. Bertagnolli:
Hydrogen-related influence of the metallization stack on characteristics and reliability of a trench gate oxide. Microelectron. Reliab. 45(9-11): 1355-1359 (2005)

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