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"Microstructure simulation of grain growth in Cu through silicon vias using ..."

Nabi Nabiollahi et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.02.009

access: closed

type: Journal Article

metadata version: 2021-10-14

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Nabi Nabiollahi, Nele Moelans, Mario Gonzalez, Joke De Messemaeker, Christopher J. Wilson, Kristof Croes, Eric Beyne, Ingrid De Wolf:
Microstructure simulation of grain growth in Cu through silicon vias using phase-field modeling. Microelectron. Reliab. 55(5): 765-770 (2015)

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