"SiLKTM etch optimization and electrical characterization for ..."

Ramana Murthy et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.06.005

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type: Journal Article

metadata version: 2020-02-22

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Ramana Murthy, Y. W. Chen, A. Krishnamoorthy, X. T. Chen:
SiLK^TM etch optimization and electrical characterization for 0.13 mum interconnects. Microelectron. Reliab. 45(3-4): 507-516 (2005)

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