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"MEMS reliability modelling methodology: application to wobble micromotor ..."

Sylvaine Muratet et al. (2003)

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DOI: 10.1016/S0026-2714(03)00330-5

access: closed

type: Journal Article

metadata version: 2020-02-22

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Sylvaine Muratet, Jean-Yves Fourniols, Georges Soto-Romero, Aitor Endemaño Isasi, Antoine Marty, Marc P. Y. Desmulliez:
MEMS reliability modelling methodology: application to wobble micromotor failure analysis. Microelectron. Reliab. 43(9-11): 1945-1949 (2003)

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