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"Creep as a reliability problem in MEMS."

Robert Modlinski et al. (2004)

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DOI: 10.1016/J.MICROREL.2004.07.066

access: closed

type: Journal Article

metadata version: 2022-11-16

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Robert Modlinski, Ann Witvrouw, Petar Ratchev, Anne Jourdain, Veerle Simons, H. A. C. Tilmans, Jaap M. J. den Toonder, Robert Puers, Ingrid De Wolf:
Creep as a reliability problem in MEMS. Microelectron. Reliab. 44(9-11): 1733-1738 (2004)

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