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"Backend dielectric breakdown dependence on linewidth and pattern density."

Linda Milor, Changsoo Hong (2007)

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DOI: 10.1016/J.MICROREL.2007.07.023

access: closed

type: Journal Article

metadata version: 2022-01-03

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Linda Milor, Changsoo Hong:
Backend dielectric breakdown dependence on linewidth and pattern density. Microelectron. Reliab. 47(9-11): 1473-1477 (2007)

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