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"A methodology for accelerated testing by mechanical actuation of MEMS devices."

Michael McMahon, Jeff Jones (2012)

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DOI: 10.1016/J.MICROREL.2012.02.007

access: closed

type: Journal Article

metadata version: 2020-02-22

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Michael McMahon, Jeff Jones:
A methodology for accelerated testing by mechanical actuation of MEMS devices. Microelectron. Reliab. 52(7): 1382-1388 (2012)

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