"Chemical and physical limits on the performance of metal silicate high-k ..."

Gerald Lucovsky, Gilbert B. Rayner, Robert S. Johnson (2001)

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DOI: 10.1016/S0026-2714(01)00046-4

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type: Journal Article

metadata version: 2020-02-22

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Gerald Lucovsky, Gilbert B. Rayner, Robert S. Johnson:
Chemical and physical limits on the performance of metal silicate high-k gate dielectrics. Microelectron. Reliab. 41(7): 937-945 (2001)

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