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"Bond strain and defects at interfaces in high-k gate stacks."

Gerald Lucovsky, James C. Phillips (2005)

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DOI: 10.1016/J.MICROREL.2004.11.051

access: closed

type: Journal Article

metadata version: 2021-09-29

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Gerald Lucovsky, James C. Phillips:
Bond strain and defects at interfaces in high-k gate stacks. Microelectron. Reliab. 45(5-6): 770-778 (2005)

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