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"Spherical aberration correction in aplanatic solid immersion lens imaging ..."
Yang Lu et al. (2012)
- Yang Lu
, Euan Ramsay, Christopher R. Stockbridge, Abdulkadir Yurt
, F. Hakan Köklü, Thomas G. Bifano
, M. Selim Ünlü, Bennett B. Goldberg:
Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror. Microelectron. Reliab. 52(9-10): 2120-2122 (2012)
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