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"Impact of substrate resistance and layout on passivation etch-induced ..."

Po Li et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.02.024

access: closed

type: Journal Article

metadata version: 2020-02-22

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Po Li, Yung-Cheng Wang, Jing-Wei Peng, David Wei Zhang:
Impact of substrate resistance and layout on passivation etch-induced wafer arcing and reliability. Microelectron. Reliab. 55(6): 931-936 (2015)

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