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"Electrical properties of hafnium silicate films obtained from a ..."

Martin Lemberger et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.040

access: closed

type: Journal Article

metadata version: 2020-10-26

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Martin Lemberger, Albena Paskaleva, Stefan Zürcher, Anton J. Bauer, Lothar Frey, Heiner Ryssel:
Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor. Microelectron. Reliab. 45(5-6): 819-822 (2005)

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