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"A Novel Application of the FIB Lift-out Technique for 3-D TEM Analysis."

Jon C. Lee, David Su, J. H. Chuang (2001)

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DOI: 10.1016/S0026-2714(01)00174-3

access: closed

type: Journal Article

metadata version: 2020-02-22

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Jon C. Lee, David Su, J. H. Chuang:
A Novel Application of the FIB Lift-out Technique for 3-D TEM Analysis. Microelectron. Reliab. 41(9-10): 1551-1556 (2001)

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