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"A Novel Application of C-AFM: Deep Sub-micron Single Probing for IC ..."

Jon C. Lee, J. H. Chuang (2003)

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DOI: 10.1016/S0026-2714(03)00335-4

access: closed

type: Journal Article

metadata version: 2020-02-22

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Jon C. Lee, J. H. Chuang:
A Novel Application of C-AFM: Deep Sub-micron Single Probing for IC Failure Analysis. Microelectron. Reliab. 43(9-11): 1687-1692 (2003)

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