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"Influence of the manufacturing process on the electrical properties of ..."
Mario Lanza et al. (2007)
- Mario Lanza, Marc Porti
, Montserrat Nafría
, Guenther Benstetter
, Werner Frammelsberger
, Heiko Ranzinger, E. Lodermeier, G. Jaschke:
Influence of the manufacturing process on the electrical properties of thin (k stacks observed with CAFM. Microelectron. Reliab. 47(9-11): 1424-1428 (2007)
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