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"Evaluation of via density and low-k Young's modulus influence on ..."

Luka Kljucar et al. (2016)

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DOI: 10.1016/J.MICROREL.2015.11.012

access: closed

type: Journal Article

metadata version: 2022-12-02

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Luka Kljucar, Mario Gonzalez, Ingrid De Wolf, Kristof Croes, Jürgen Bömmels, Zsolt Tökei:
Evaluation of via density and low-k Young's modulus influence on mechanical performance of advanced node multi-level Back-End-Of-Line. Microelectron. Reliab. 56: 93-100 (2016)

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