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"Iterative algorithm for automatic alignment by object transformation."

Hyong Tae Kim, Hae Jeong Yang, Seung Yub Baek (2007)

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DOI: 10.1016/J.MICROREL.2006.06.008

access: closed

type: Journal Article

metadata version: 2020-02-22

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Hyong Tae Kim, Hae Jeong Yang, Seung Yub Baek:
Iterative algorithm for automatic alignment by object transformation. Microelectron. Reliab. 47(6): 972-985 (2007)

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