"Reliability improvement by the suppression of keyhole generation in W-plug ..."

Jong Hun Kim et al. (2005)

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DOI: 10.1016/J.MICROREL.2005.07.048

access: closed

type: Journal Article

metadata version: 2022-04-22

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Jong Hun Kim, Kyosun Kim, Seok Hee Jeon, Jong Tae Park:
Reliability improvement by the suppression of keyhole generation in W-plug vias. Microelectron. Reliab. 45(9-11): 1455-1458 (2005)

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