BibTeX record journals/mr/KaushikCDERCRWCG05

download as .bib file

@article{DBLP:journals/mr/KaushikCDERCRWCG05,
  author    = {Vidya Kaushik and
               Martine Claes and
               Annelies Delabie and
               Sven Van Elshocht and
               Olivier Richard and
               Thierry Conard and
               Erika Rohr and
               Thomas Witters and
               Matty Caymax and
               Stefan De Gendt},
  title     = {Observation and characterization of defects in HfO\({}_{\mbox{2}}\)
               high-K gate dielectric layers},
  journal   = {Microelectron. Reliab.},
  volume    = {45},
  number    = {5-6},
  pages     = {798--801},
  year      = {2005},
  url       = {https://doi.org/10.1016/j.microrel.2004.11.045},
  doi       = {10.1016/j.microrel.2004.11.045},
  timestamp = {Sat, 22 Feb 2020 19:27:20 +0100},
  biburl    = {https://dblp.org/rec/journals/mr/KaushikCDERCRWCG05.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
a service of Schloss Dagstuhl - Leibniz Center for Informatics