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"SrO capping effect for La2O3/Ce-silicate gate ..."

Kuniyuki Kakushima et al. (2010)

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DOI: 10.1016/J.MICROREL.2009.12.004

access: closed

type: Journal Article

metadata version: 2021-10-14

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Kuniyuki Kakushima, K. Okamoto, T. Koyanagi, M. Kouda, Kiichi Tachi, Takamasa Kawanago, J. Song, Parhat Ahmet, Hiroshi Nohira, Kazuo Tsutsui, Nobuyuki Sugii, Takeo Hattori, Hiroshi Iwai:
SrO capping effect for La₂O₃/Ce-silicate gate dielectrics. Microelectron. Reliab. 50(3): 356-359 (2010)

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