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"RTA effects on the formation process of embedded luminescent Si ..."

T. S. Iwayama, T. Hama, D. E. Hole (2007)

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DOI: 10.1016/J.MICROREL.2007.01.028

access: closed

type: Journal Article

metadata version: 2020-02-22

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T. S. Iwayama, T. Hama, D. E. Hole:
RTA effects on the formation process of embedded luminescent Si nanocrystals in SiO₂. Microelectron. Reliab. 47(4-5): 781-785 (2007)

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