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"Accelerated testing for time dependent dielectric breakdown (TDDB) ..."

Anand Inani, Victor Koldyaev, Spencer Graves (2007)

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DOI: 10.1016/J.MICROREL.2007.07.053

access: closed

type: Journal Article

metadata version: 2020-02-22

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Anand Inani, Victor Koldyaev, Spencer Graves:
Accelerated testing for time dependent dielectric breakdown (TDDB) evaluation of embedded DRAM capacitors using tantalum pentoxide. Microelectron. Reliab. 47(9-11): 1429-1433 (2007)

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