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"Modeling of the breakdown mechanisms for porous copper/low-k process flows."

Changsoo Hong, Linda Milor (2007)

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DOI: 10.1016/J.MICROREL.2007.07.020

access: closed

type: Journal Article

metadata version: 2022-01-03

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Changsoo Hong, Linda Milor:
Modeling of the breakdown mechanisms for porous copper/low-k process flows. Microelectron. Reliab. 47(9-11): 1478-1482 (2007)

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