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"LPCVD-silicon oxynitride films: interface properties."

Elena Halova et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.011

access: closed

type: Journal Article

metadata version: 2023-10-29

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Elena Halova, Sashka Alexandrova, A. Szekeres, Mircea Modreanu:
LPCVD-silicon oxynitride films: interface properties. Microelectron. Reliab. 45(5-6): 982-985 (2005)

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