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"Identification of oxide defects in semiconductor devices: A systematic ..."

Wolfgang Goes et al. (2018)

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DOI: 10.1016/J.MICROREL.2017.12.021

access: closed

type: Journal Article

metadata version: 2023-07-13

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Wolfgang Goes, Yannick Wimmer, Al-Moatasem El-Sayed, Gerhard Rzepa, Markus Jech, Alexander L. Shluger, Tibor Grasser:
Identification of oxide defects in semiconductor devices: A systematic approach linking DFT to rate equations and experimental evidence. Microelectron. Reliab. 87: 286-320 (2018)

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