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"Chromatic and spherical aberration correction for silicon aplanatic solid ..."

Bennett B. Goldberg et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.07.047

access: closed

type: Journal Article

metadata version: 2023-10-28

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Bennett B. Goldberg, Abdulkadir Yurt, Yang Lu, Euan Ramsay, F. Hakan Köklü, J. Mertz, Thomas G. Bifano, M. S. Ünlü:
Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits. Microelectron. Reliab. 51(9-11): 1637-1639 (2011)

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