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"Challenges for dielectric materials in future integrated circuit technologies."

C. M. Garner et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.053

access: closed

type: Journal Article

metadata version: 2020-02-22

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C. M. Garner, G. Kloster, G. Atwood, L. Mosley, A. C. Palanduz:
Challenges for dielectric materials in future integrated circuit technologies. Microelectron. Reliab. 45(5-6): 919-924 (2005)

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