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"Vacuum quality evaluation for uncooled micro bolometer thermal imager sensors."

Michael Elßner (2014)

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DOI: 10.1016/J.MICROREL.2014.07.094

access: closed

type: Journal Article

metadata version: 2020-02-22

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Michael Elßner:
Vacuum quality evaluation for uncooled micro bolometer thermal imager sensors. Microelectron. Reliab. 54(9-10): 1758-1763 (2014)

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