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"Scanning probe microscopy in semiconductor failure analysis."

Bernd Ebersberger, Alexander Olbrich, Christian Boit (2001)

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DOI: 10.1016/S0026-2714(01)00109-3

access: closed

type: Journal Article

metadata version: 2020-02-22

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Bernd Ebersberger, Alexander Olbrich, Christian Boit:
Scanning probe microscopy in semiconductor failure analysis. Microelectron. Reliab. 41(8): 1231-1236 (2001)

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