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"On the influence of substrate cleaning method and rapid thermal annealing ..."
Salvador Dueñas et al. (2005)
- Salvador Dueñas
, Helena Castán
, Héctor García
, J. Barbolla, E. San Andrés, I. Mártil
, G. González-Díaz
:
On the influence of substrate cleaning method and rapid thermal annealing conditions on the electrical characteristics of Al/SiNx/SiO2/Si fabricated by ECR-CVD. Microelectron. Reliab. 45(5-6): 978-981 (2005)
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