"Backside interferometric methods for localization of ESD-induced leakage ..."

Viktor Dubec et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.07.029

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type: Journal Article

metadata version: 2022-03-16

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Viktor Dubec, Sergey Bychikhin, Dionyz Pogany, Erich Gornik, Tilo Brodbeck, Wolfgang Stadler:
Backside interferometric methods for localization of ESD-induced leakage current and metal shorts. Microelectron. Reliab. 47(9-11): 1539-1544 (2007)

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