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"Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk ..."

M. Dardalhon et al. (2002)

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DOI: 10.1016/S0026-2714(02)00230-5

access: closed

type: Journal Article

metadata version: 2021-10-14

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M. Dardalhon, Vincent Beroulle, Laurent Latorre, Pascal Nouet, Guy Perez, Jean Marc Nicot, Coumar Oudéa:
Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining. Microelectron. Reliab. 42(9-11): 1777-1782 (2002)

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