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"Characterizations of high resistivity TiNxOy thin ..."

Duy Cuong Nguyen et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.014

access: closed

type: Journal Article

metadata version: 2020-03-02

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Duy Cuong Nguyen, Dong-Jin Kim, Byoung-Don Kang, Chang Soo Kim, Soon-Gil Yoon:
Characterizations of high resistivity TiN_xO_y thin films for applications in thin film resistors. Microelectron. Reliab. 47(4-5): 752-754 (2007)

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