"Development of a permittivity extraction method for ultra low k ..."

Olga Cueto et al. (2007)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2007.01.057

access: closed

type: Journal Article

metadata version: 2022-11-04

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/CuetoACTBFB07
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/CuetoACTBFB07
Olga Cueto, Myriam Assous, François de Crecy, A. Toffoli, David Bouchu, M. Fayolle, Frédéric Boulanger:
Development of a permittivity extraction method for ultra low k dielectrics integrated in advanced interconnects. Microelectron. Reliab. 47(4-5): 769-772 (2007)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.