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"A novel, zone based process monitoring method for low cost MCM-D ..."

Didier Cottet, Michael Scheffler, Gerhard Tröster (2002)

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DOI: 10.1016/S0026-2714(01)00135-4

access: closed

type: Journal Article

metadata version: 2020-02-22

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Didier Cottet, Michael Scheffler, Gerhard Tröster:
A novel, zone based process monitoring method for low cost MCM-D substrates manufactured on large area panels. Microelectron. Reliab. 42(3): 417-426 (2002)

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