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"Stress immunity enhancement of the SiN uniaxial strained n-channel ..."

Yung-Yu Chen, Chih-Ren Hsieh, Fang-Yu Chiu (2012)

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DOI: 10.1016/J.MICROREL.2011.12.023

access: closed

type: Journal Article

metadata version: 2020-02-22

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Yung-Yu Chen, Chih-Ren Hsieh, Fang-Yu Chiu:
Stress immunity enhancement of the SiN uniaxial strained n-channel metal-oxide-semiconductor field-effect-transistor by channel fluorine implantation. Microelectron. Reliab. 52(6): 995-998 (2012)

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