"Breakdown data generation and in-die deconvolution methodology to address ..."

Fen Chen et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.09.017

access: closed

type: Journal Article

metadata version: 2020-02-22

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Fen Chen, Carole Graas, Michael A. Shinosky, Kai Zhao, Shreesh Narasimha, Xiao Hu Liu, Chunyan Tian:
Breakdown data generation and in-die deconvolution methodology to address BEOL and MOL dielectric breakdown challenges. Microelectron. Reliab. 55(12): 2727-2747 (2015)

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