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"Ultra-thin oxides on silicon fabricated using ultra-slow multicharged ion ..."

G. Borsoni et al. (2001)

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DOI: 10.1016/S0026-2714(01)00076-2

access: closed

type: Journal Article

metadata version: 2023-03-28

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G. Borsoni, N. Béchu, M. Gros-Jean, Michael L. Korwin-Pawlowski, R. Laffitte, V. Le Roux, L. Vallier, Névine Rochat, C. Wyon:
Ultra-thin oxides on silicon fabricated using ultra-slow multicharged ion beams. Microelectron. Reliab. 41(7): 1063-1066 (2001)

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